Investigation of Static Sequential Infiltration Synthesis into Polystyrene-block-Maltoheptaose by neutron reflectivity
In block copolymer lithography, metal oxide is often infiltrated selectively into one block, to establish high etch selectivity between blocks. This work investigates two different infiltration methods, where Alumina is infiltrated into 12 nm pitch Polystyrene-block-Maltoheptaose. A previous data collection of multiple pulse infiltration was made at Super-ADAM, ILL in February 2020, where analysis is ongoing. The proposed data set focuses on static (single pulse) sequential infiltration synthesis, which is a less material consuming process, but an initial test still indicates infiltration of more material per cycle. The study is expected to be of use in nanofabrication of sub-10 nm features.
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Anette Löfstrand and VOROBIEV Alexei. (2021). Investigation of Static Sequential Infiltration Synthesis into Polystyrene-block-Maltoheptaose by neutron reflectivity. Institut Laue-Langevin (ILL) doi:10.5291/ILL-DATA.CRG-2762
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