DOI > 10.5291/ILL-DATA.DIR-130

This proposal is publicly available since 11/17/2019

Title

Characterisation of Interfaces with delamination problems within the framework of the IRT nanoelectronics

Abstract

There is no abstract

Experimental Report

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Data Citation

The recommended format for citing this dataset in a research publication is in the following format:

IMBERT Gregory; CUBITT Robert; GUTFREUND Philipp; PONARD Anne and SEGURA RUIZ Jaime Alberto. (2014). Characterisation of Interfaces with delamination problems within the framework of the IRT nanoelectronics. Institut Laue-Langevin (ILL) doi:10.5291/ILL-DATA.DIR-130

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Metadata

Experiment Parameters

  • Environment temperature

    ambient

Sample Parameters

  • Formula

    • Si
    • SiOCH
    • SiN
  • Consistence

    Polycrystalline
  • Mass

    10
  • Size

    100
  • Surface

    5*5cm
  • Container

    Sample crystal silicon wafer