DOI > 10.5291/ILL-DATA.DIR-131

This proposal is publicly available since 12/01/2019

Title

Characterisation of interfaces with delamination problems within the framework of the IRT nanoelec

Abstract

Abstract is not yet public

Experimental Report

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Data Citation

The recommended format for citing this dataset in a research publication is in the following format:

IMBERT Gregory; CUBITT Robert; GUTFREUND Philipp; PONARD Anne and SEGURA RUIZ Jaime Alberto. (2014). Characterisation of interfaces with delamination problems within the framework of the IRT nanoelec. Institut Laue-Langevin (ILL) doi:10.5291/ILL-DATA.DIR-131

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Metadata

Experiment Parameters

  • Environment temperature

    ambient

Sample Parameters

  • Formula

    • Si
    • SiOCH
    • SiN
  • Consistence

    polycrystalline
  • Mass

    10
  • Size

    100
  • Surface

    5*5 cm
  • Container

    sample silcon wafer